cvb.authors: ''
cvb.fail: null
cvb.id: null
cvb.pages: 30-37
cvb.pdf_name: ICTERI-2013-p-030-037.pdf
cvb.title: "Modeling, Algorithms and Implementation of the Microcontroller Control\
  \ \nSystem for the Ion Beam Forming Process for Nanostructures Etching"
cvb.vol_number: 1000
dblp.authors:
- dblp_author_id: https://dblp.org/pid/131/0998
  gnd_id: null
  label: Oleksiy Voz
  orcid_id: null
  wikidata_id: null
- dblp_author_id: https://dblp.org/pid/131/1005
  gnd_id: null
  label: Aleksandr Kropotov
  orcid_id: null
  wikidata_id: null
- dblp_author_id: https://dblp.org/pid/131/1032
  gnd_id: null
  label: Andrii Derevianko
  orcid_id: null
  wikidata_id: null
- dblp_author_id: https://dblp.org/pid/131/1039
  gnd_id: null
  label: Aleksandr Ralo
  orcid_id: null
  wikidata_id: null
- dblp_author_id: https://dblp.org/pid/131/1053
  gnd_id: null
  label: Sergiy Styervoyedov
  orcid_id: null
  wikidata_id: null
dblp.dblp_proceeding_id: https://dblp.org/rec/conf/icteri/2013
dblp.dblp_publication_id: https://dblp.org/rec/conf/icteri/RaloDKSV13
dblp.pdf_id: Vol-1000/ICTERI-2013-p-030-037
dblp.title: Modeling, Algorithms and Implementation of the Microcontroller Control
  System for the Ion Beam Forming Process for Nanostructures Etching.
dblp.volume_number: 1000
spt.description: null
spt.html_url: /None.html
spt.id: null
spt.pdfUrl: !!python/object/new:linkml_runtime.utils.metamodelcore.URI
  args:
  - https://ceur-ws.org/Vol-1000/ICTERI-2013-p-030-037.pdf
  state:
    _len: null
    _s: null
spt.session: null
spt.title: "Modeling, Algorithms and Implementation of the Microcontroller Control\
  \ \nSystem for the Ion Beam Forming Process for Nanostructures Etching"
spt.volume:
  acronym: ICTERI 2013
  date: '2013-06-13'
  dblp: conf/icteri/2013
  description: Proceedings of ICTERI 2013 workshop
  k10plus: '787812560'
  number: 1000
  title: 'Proceedings of the 9th International Conference on ICT in Education, Research
    and Industrial Applications: Integration, Harmonization and Knowledge Transfer'
  url: http://ceur-ws.org/Vol-1000/
  urn: urn:nbn:de:0074-1000-9
  wikidataid: Q113545058
spt.wikidataid: null
version.cm_url: https://github.com/ceurws/ceur-spt
version.version: 0.0.7
