<!DOCTYPE article PUBLIC "-//NLM//DTD JATS (Z39.96) Journal Archiving and Interchange DTD v1.0 20120330//EN" "JATS-archivearticle1.dtd">
<article xmlns:xlink="http://www.w3.org/1999/xlink">
  <front>
    <journal-meta>
      <journal-title-group>
        <journal-title>CEUR Workshop Proceedings</journal-title>
      </journal-title-group>
    </journal-meta>
    <article-meta>
      <article-id pub-id-type="doi">10.18287/1613-0073-2016-1638-700-708</article-id>
      <title-group>
        <article-title>ANALYTICAL MODELING OF DISCRIMINATION SCHEME FOR DETECTION OF ANGULAR RATE AND ACCELERATION FOR A 4-DOF MEMS GYRO- ACCELEROMETER</article-title>
      </title-group>
      <contrib-group>
        <contrib contrib-type="author">
          <string-name>Payal Verma</string-name>
          <xref ref-type="aff" rid="aff0">0</xref>
        </contrib>
        <contrib contrib-type="author">
          <string-name>S.A. Fomchenkov</string-name>
          <xref ref-type="aff" rid="aff0">0</xref>
        </contrib>
        <aff id="aff0">
          <label>0</label>
          <institution>Samara National Research University</institution>
          ,
          <addr-line>Samara</addr-line>
          ,
          <country country="RU">Russia</country>
        </aff>
      </contrib-group>
      <pub-date>
        <year>2016</year>
      </pub-date>
      <volume>1638</volume>
      <fpage>700</fpage>
      <lpage>708</lpage>
      <abstract>
        <p>The paper reports an analytical model of a 4-DOF gyroaccelerometer consisting of 2-DOF drive and 2-DOF sense oscillators configured orthogonally. A detection scheme for time varying angular rate and linear acceleration, by combining the structural-model of gyro-accelerometer with the processes of synchronous demodulation and filtration, which leads to the inphase and quadrature components of the system's output signal. These two components can be utilized in the detection of angular motion and linear acceleration. The in-phase signal can be used for angular rate detection and the quadrature signal can be utilized for linear acceleration. Finally, the results of the model have been validated by comparing with MATLAB®/Simulink data which shows excellent matching with each other.</p>
      </abstract>
      <kwd-group>
        <kwd>MEMS</kwd>
        <kwd>4-DOF</kwd>
        <kwd>Gyro-accelerometer</kwd>
        <kwd>Synchronous demodulation</kwd>
      </kwd-group>
    </article-meta>
  </front>
  <body>
    <sec id="sec-1">
      <title>-</title>
      <p>
        It is a well-known fact that all vibratory gyroscopes operate on the basis of transfer of
energy from one mode to the other. The device may have either single DOF [
        <xref ref-type="bibr" rid="ref1">1</xref>
        ] or
multi-DOF oscillators [
        <xref ref-type="bibr" rid="ref2 ref3 ref4 ref5">2-5</xref>
        ] which act as two orthogonally configured subsystems, a
self-tuned oscillator forming the drive mode and a micro-g accelerometer, forming the
sense mode. In the event of an angular rate, the transfer of energy from one mode to
the other is detected and processed using suitable circuitry to produce the desired
output. It is quite obvious that all vibratory gyroscopes can also sense linear
acceleration in addition to angular rate sensing at their events of occurrence. Considering the
strategy of simultaneous detection of linear acceleration and angular rate at their
events, a controller circuit has been reported for a 2-DOF conventional gyroscope [
        <xref ref-type="bibr" rid="ref6">6</xref>
        ].
Some multi-DOF systems have also been proposed and realized which can sense
linear acceleration along with angular rate [
        <xref ref-type="bibr" rid="ref7 ref8">7, 8</xref>
        ], while offering other advantages such as
increased robustness and immunity to fabrication imperfections.
      </p>
      <p>
        For the development of superior performance inertial sensors, the characteristics of
the device have to be thoroughly understood and the design optimized which can
achieved by taking proper care in the design and modeling stages. Hence
mathematical modeling plays a key role in device design as well for optical elements [
        <xref ref-type="bibr" rid="ref10 ref11 ref12 ref13 ref9">9-13</xref>
        ].
Various mathematical models have been reported separately for accelerometer and
gyroscope devices. Some of the mathematical models for gyroscopes have reported
acceleration effect as an error, however confirming its presence. Recently,
mathematical models of multi-DOF structures for simultaneous detection of acceleration effect
and angular rate have also been reported, few of them are, 2-DOF gyro-accelerometer
[
        <xref ref-type="bibr" rid="ref14">14</xref>
        ], a 2-DOF drive and 1-DOF sense gyro-accelerometer [
        <xref ref-type="bibr" rid="ref15 ref16 ref7">7, 15, 16</xref>
        ] and a 1-DOF
drive and 2-DOF sense gyro-accelerometer [
        <xref ref-type="bibr" rid="ref8">8</xref>
        ].
The 4-DOF gyro-accelerometer system exploits the dynamic amplification in the
decoupled 2-DOF drive and sense oscillators so as to attain large amplitude of
oscillation without resonance [
        <xref ref-type="bibr" rid="ref17">17</xref>
        ]. As shown in Fig. 1, this system is composed of three
proof masses that are interconnected by flexures springs. The mass  1 is designed
such that it is constrained in the sense direction whilst it is excited in the drive
direction alone. The configuration of the masses  2 and  3 within the decoupling frame
mass,   is such that these two masses are mechanically decoupled from the drive
oscillations. Therefore, the first mass  1 and the combination of mass  2, mass  3
and the decoupling frame mass   i.e. ( 2 +  3 +   ) form the 2-DOF oscillator in
the drive direction. The masses  2 and  3 oscillate independantly in the sense
direction thus forming the 2-DOF sense direction oscillator. The larger mass  2 represents
the primary mass, which generates the Coriolis force that excites the sense oscillator.
The smaller mass  3 is a secondary mass and is designed to serve as a dynamic
vibration absorber of mass  2 in the sense direction. In the event of an angular motion,
the sense masses  2 and  3 are influenced by Coriolis force and begin to oscillate in
the sense direction. Each of both 2-DOF drive and sense oscillators has two resonance
peaks and flat zone in between peaks. The most important requirement of the overall
4-DOF gyro-accelerometer system is that the flat amplitude regions of both the
2DOF oscillators must overlap precisely and the operating frequencies of the system
must be located in their flat amplitude zones, thereby leading to the maximum
robustness of the performance against the fluctuations of system parameters. The equations
of motion can be represented by Newton’s second law of motion, [
        <xref ref-type="bibr" rid="ref17 ref2">2, 17</xref>
        ]:
 1 ̈1 +  1  ̇1 + ( 1 +  2 ) 1 =  2  2 +   ( ) ,
   ̈2 +  2  ̇2 +  2  2 =  2  1,
 2 ̈2 +  2  ̇2 + ( 2 +  3 ) 2 =  3  3 − 2 2Ω  ̇2
− 2Ω̇   2 +  2(  sin  −   cos  ),
 3 ̈3 +  3  ̇3 +  3  3 =  3  2 − 2 3Ω  ̇2
− 3Ω̇   2 +  3(  sin  −   cos  ),
(1)
(2)
(3)
(4)
(5)
respectively where,   ( ) =   sin    is the sinusoidal driving force that excites the
driven mass  1 at the drive frequency   , Ω = Ω
 cos(
), where Ω is the
amplitude of angular velocity,  is the frequency of angular rate.  1 ,  2 ,  2 and  3 are
the damping coefficients corresponding to the respective stiffness co-efficients  1 ,
 2 ,  2 and  3 as shown in Fig. 1. The term Ω̇  2 is the Euler’s acceleration. The

notations   and   are external accelerations along their respective axes and these
have been included for the analysis of gyro-accelerometer system. The terms
2 2Ω  ̇2 and 2 3Ω  ̇2 are the Coriolis forces that excite the respective masses,  2
and  3 in sense direction. The corresponding displacements of the masses,  2 and
 3, are also affected by external linear acceleration.
3
      </p>
    </sec>
    <sec id="sec-2">
      <title>Detection Scheme</title>
      <p>The scheme for the discrimination of the angular rate and acceleration is presented
below. This scheme for angular rate amplitude, Ω , and associated frequency,  ,
along with linear acceleration is applicable in case where angular rate is time
dependent. The absolute transformation of (4) yields the solution that comprises both
temporally damped and un-damped terms. The temporal decay terms, however, are not
trivial as these are vital for deciding the turn-on time and settling time of the system.
Since the output signal is processed after the device output is settled down, the
contributions of decay terms become insignificant. Therefore the settled solution, of (4), is
written as:
 ̅3( ) =  1 cos{( +  ) +   ( ) +  2 ( +  ) +   ( +  )}
+ 2 cos{( −  ) +   ( ) +  2 (
−  ) +   (
−  )}
+ℛ  2 ( )   ( )sin (</p>
      <p>+  2 ( ) +   ( )) ,
where ℛ , external acceleration and,
 1,2 = −Ωo   22   ( )( ± 12 ) 2 ( ±  )  ( ±  ),
 −2( ) = [( 12 −  2)( 22 −  2)−  2 24 − 4 1  2  2]2
+4[ 1 ( 22 −  2) +  2 ( 12 −  2) ]2,
   ( ) = −tan−1</p>
      <p>2 { 1 ( 22 −  2)+  2 ( 12 −  2)}
( 12 −  2)( 22 −  2)−  2 24 − 4 1  2  2 ,
 −2( )= [( 22 −  2)( 32 −  2)−  2 34 − 4 2  3  2]2
+4[ 2 ( 32 −  2) +  3 ( 22 −  2) ]2,
  ( ) = −tan−1
2 { 2 ( 32 −  2)+  3 ( 22 −  2)}
,
( 22 −  2)( 32 −  2)−  2 34 − 4 2  3  2
 22 ( ) = [( 22 +  32 −  2)2 + 4 22  2],</p>
      <p>2 2 
 2 ( )= tan−1  22 +  32 −  2 ,
 12 = ( 1 +  2 )/ 1;  22 =  2 /  ,
 22 = ( 2 +  3 )/ 2;  32 =  3 / 3,
 2 22 =  2 / 1;  2 32 =  3 / 2;  2 =   / 1,
 2 =  3/ 2;   =   / 1; 1 =  1 /2 1,
 2 =  2 /2  ;  2 =  2 /2 2;  3 =  3 /2 3.</p>
      <p>
        As is evident from (5), the output signal is modulated by a sinusoidal function. The
synchronous demodulation of this signal yields the in-phase and quadrature
components defined as ̅ = ̅3( )cos( )and ̅ = ̅3( )sin( )respectively. In order to
arrive at the low-pass-filtered solution after demodulation, we primarily deal with the
in-phase component, ̅ . The quadrature component, ̅ , can be tackled accordingly.
With the aid of trigonometric identities and settled solution (5), the in-phase
component ̅ is rearranged as,
̅ =  {cos(2 +   ( )+  )+ cos(  ( )+  )}cos( +  )
− {sin(2 +   ( )+  )+ sin(  ( )+  )}sin( +  )
1
2   2 ( )  ( ){sin( 2 ( )+   ( ))
+ ℛ
+sin(2 +  2 ( )+   ( ))}. (6)
The modified parameters included in (6), as per [
        <xref ref-type="bibr" rid="ref6 ref7">6, 7</xref>
        ], are defined as,
 ̅= 21( 1 +  2);  = 21( 1 −  2),
 ̅= 12[ 2 ( +  )+  2 ( −  )+   ( +  )+   ( −  )],
      </p>
      <p>1
Δ = 2[ 2 ( +  )−  2 ( −  )+   ( +  )−   ( −  )].</p>
      <p>Further, the output signals terms cos( +  )and sin( +  )in (6) led by phase
shift,  , are related to the angular rate. The phase shift,  , in these function is
where
  = 
as,
where
  = 
2
2
+   ,
distorted by frequency,  . Hence, it is essential to employ low-pass-filtering in order
to eliminate the terms having doubled frequency. Thus, the filtered solution after
trigonometric manipulation is given by,
 ̅ =   cos(
+   ) +
2   2 ( )  ( ) sin ( 2 ( ) +   ( )),</p>
      <p>ℛ
 2 =  cos2 ( +   ( )) +  2sin2 ( +   ( )),
  = tan−1 [</p>
      <p>tan ( +   ( ))].</p>
      <p>Similarly, the low-pass-filtered quadrature component after demodulation is written
 ̅ =   cos(
+   ) +
2   2 ( )  ( ) cos ( 2 ( ) +   ( )),</p>
      <p>ℛ
 2 =  sin2 ( +   ( )) +  2cos2 ( +   ( )),
(7)
(7a)
(7b)
(8)
(8a)
(8b)
  = −tan−1 [</p>
      <p>cot ( +   ( ))].</p>
      <p>
        It is worth mentioning here that the first terms pertaining to gyro action of the of
respective in-phase and quadrature signals (7) and (8) are distorted both in amplitudes,
  and   , and in corresponding phases,   and   , by  . At the same time, the
linear acceleration terms in these signals are unaffected by  . From equations (7) and (8)
it is also inferred that at the optimum operating condition of the present device, the
system must be driven at zero-phase frequency, as already emphasized [
        <xref ref-type="bibr" rid="ref17">17</xref>
        ], of the
2DOF drive oscillator and the corresponding structural frequencies,  1 and  2 must
be equal and these must match with driving frequency that results into   ( ) = 0.
Likewise, the anti-resonance frequency of passive mass ( 2
) amplitude must also
match with drive frequency and sense mass related structural frequencies,  2 and
 3 √(1 +  2), must be equal [
        <xref ref-type="bibr" rid="ref17">17</xref>
        ]. That leads to the phase,  2 ( ) +   ( ) = 0.
As a consequence of this the acceleration term in in-phase signal (7) vanishes and
only the gyro action related term exists. On the other hand in quadrature signal (8),
the acceleration term exist and gyro related term is almost insignificant. Therefore,
the in-phase signal (7) can be used for angular rate detection and the quadrature one
(8) can be utilized for linear acceleration extraction under such optimized operating
condition of the gyro-accelerometer system.
4
      </p>
    </sec>
    <sec id="sec-3">
      <title>Results and discussion</title>
      <p>Considering the design equations, the spring constants and structural frequencies by
adjusting mass values,  1,  2,  3, frame mass,   and subsequently mass ratios,  2
and  2, have been decided optimally. The values of these and other parameters are
listed in Table 1. The following figures have been calculated by using these values
unless it is specified.</p>
      <sec id="sec-3-1">
        <title>Parameters Values</title>
        <p>Active mass (m1) 201.9 x 10-9 kg
Passive mass (m2) 57.24 x 10-9 kg
Sense mass (m3) 5.6 x 10-9 kg
Frame mass (mf) 10.5 x 10-9 kg
Spring constant (k1x; k2x) 153.5 N/m; 87.59 N/m
Spring constant (k2y; k3y) 62.26 N/m; 6.1 N/m
Frequencies (ω1x = ω2x = ω2y) 5.5 kHz</p>
      </sec>
      <sec id="sec-3-2">
        <title>Frequency (ω3y) 5.25 kHz</title>
        <p>Fo; Angular rate (Ωo) 2.171x10-5 N; 200 rad
Figure 2a-d are Bode plots of the demodulated and low-pass-filtered in-phase and
quadrature components of amplitudes and corresponding emerged phases of Coriolis
and Euler’s signal of gyro-accelerometer for different values of driving frequency.
Figure 2a illustrates the results of respective in-phase and quadrature components,  
and   , calculated with the help of (7a) and (8a) respectively for driving frequencies,
 =   =  1 and   = 1.005  1 . From this figure it is observed that a slight
deviation of driving frequency,   , from  1 within the range of drive and sense
bandwidth does not have the considerable effect on the components   and   . For
both values of drive frequency,   , the in-phase amplitude   is the major component
and increases with  in both the cases. At the same time the quadrature component,
  , is nearly zero for initial values of  , and increases thereafter with  .
The results shown in Fig. 2b correspond to phase components,   and   calculated
by using respective expressions (7b) and (8b) under similar conditions as of Fig. 2a.
The phase component   for both drive frequencies   =  1 and   = 1.005  1 ,
is nearly zero for entire calculated range of  and related curves overlap with each
other. While   , for   =  1 , is zero at  = 0 and abruptly goes gown to -90o as 
increases and persists with this value for the entire calculated range of  . On the other
hand for   = 1.005  1 , the component   rises steeply from -180o to -90o as 
increases and then persists with latter value for rest of the calculated range of  . From
this it is inferred that both in-phase and quadrature signal components are at 90o of
phase difference.</p>
        <p>Figure 2c reveals that for   = 0.95  1 , both the components   and   , have the
same nature of variation in their magnitudes as shown in Fig. 2a. However, for
  = 1.05  1 , the magnitudes of   and   are almost the same as those for
  = 0.95  1 , within the range,  &lt; 0.04   , but beyond this range of  both  
and   rise steeply and peak at about  = 0.06   . Thereafter, both amplitude
components decrease sharply and interchange their magnitudes, thus, showing balancing
natures with each other.</p>
        <p>The significant changes have occurred in the phase characteristics for such a deviation
in the drive frequency as shown in the Fig. 2d. For   = 0.95  1 ,   is zero and
invariant with the variation of  . At the same time,   is about zero at  = 0 and then
increases with  and reaches to 90o which persists for the entire calculated range of  .
The components   and   for   = 1.05  1 , show different characteristics. The
phase component   originates at -180o and as  increases phase value reaches to
90o at about  = .06   . Then it starts decreasing up to -270o, whereas   is zero in
the beginning and then it fluctuates from zero to negative values by varying  .
The transient response of the in-phase component with respect to time which is a
result of linear acceleration is shown in Fig. 3, after demodulation and filtration. The
Simulink results use the same conditions as that for the analytical analysis, which
considers the settled transient response of the device. It can be observed in Fig. 3 that
the device settles down at about 0.24 ms. The time required for settling down depends
on the ambient pressure at which the device is operated. The in-phase displacement
component,  ̅ is plotted using equation (7) and it clearly shows an excellent match
between analytical and Simulink results. Figure 3 also shows that when the device is
driven at frequency, zero-phase frequency, acceleration part is zero and gyro action is
dominant, indicated by a sinusoidal variation Hence, angular rate can be measured
through the in-phase output.</p>
        <p>Figure 4 shows the transient response of the quadrature output signal ( ̅ ) calculated
by using (8), which is a result of the combined action of Coriolis and Euler’s forces. It
is evident from the plot that the acceleration action is dominant and gyro action is
zero. Hence, acceleration action can be determined from the quadrature output. This</p>
      </sec>
    </sec>
    <sec id="sec-4">
      <title>Conclusion</title>
      <p>The simultaneous detection scheme of time varying angular rate and linear
acceleration utilizes the synchronous demodulation that yields in-phase and quadrature output
signals of the systems. In case of matched zero phase frequencies of both the
oscillators, the associated acceleration term in in-phase component becomes ineffective and
the device deliver only angular rate related signals, whereas the quadrature signal is
dominant by acceleration action and that related to angular rate becomes almost
insignificant. Therefore, in-phase signal can be used for acceleration detection and
quadrature one for angular rate extractions. MATLAB®/Simulink model of the
gyroaccelerometer system was developed in order to investigate the feasibility of such a
detection scheme and simulation results have shown excellent correspondence with
analytical results.</p>
    </sec>
  </body>
  <back>
    <ref-list>
      <ref id="ref1">
        <mixed-citation>
          1.
          <string-name>
            <surname>Alper</surname>
            <given-names>SE</given-names>
          </string-name>
          ,
          <string-name>
            <surname>Akin</surname>
            <given-names>T.</given-names>
          </string-name>
          <article-title>Symmetrical and decoupled nickel microgyroscope on insulating substrate</article-title>
          .
          <source>Sensors and Actuators A: Physical</source>
          ,
          <year>2004</year>
          ;
          <volume>115</volume>
          :
          <fpage>336</fpage>
          -
          <lpage>350</lpage>
          .
        </mixed-citation>
      </ref>
      <ref id="ref2">
        <mixed-citation>
          2.
          <string-name>
            <surname>Acar</surname>
            <given-names>C</given-names>
          </string-name>
          ,
          <article-title>Shkel A. MEMS vibratory gyroscopes-structural approaches to improve robustness</article-title>
          , Springer, Berlin,
          <year>2009</year>
          .
        </mixed-citation>
      </ref>
      <ref id="ref3">
        <mixed-citation>
          3.
          <string-name>
            <surname>Verma</surname>
            <given-names>P</given-names>
          </string-name>
          ,
          <string-name>
            <surname>Shekhar</surname>
            <given-names>C</given-names>
          </string-name>
          ,
          <string-name>
            <surname>Arya</surname>
            <given-names>SK</given-names>
          </string-name>
          ,
          <string-name>
            <surname>Gopal</surname>
            <given-names>R</given-names>
          </string-name>
          .
          <article-title>New design architecture of a 3 -DOF vibratory gyroscope with robust drive operation mode and implementation</article-title>
          .
          <source>Microsystem Technologies</source>
          ,
          <year>2015</year>
          ;
          <volume>21</volume>
          :
          <fpage>2175</fpage>
          -
          <lpage>2185</lpage>
          .
        </mixed-citation>
      </ref>
      <ref id="ref4">
        <mixed-citation>
          4.
          <string-name>
            <surname>Verma</surname>
            <given-names>P</given-names>
          </string-name>
          ,
          <string-name>
            <surname>Gopal</surname>
            <given-names>R</given-names>
          </string-name>
          ,
          <string-name>
            <surname>Butt</surname>
            <given-names>MA</given-names>
          </string-name>
          ,
          <string-name>
            <surname>Khonina</surname>
            <given-names>SV</given-names>
          </string-name>
          ,
          <string-name>
            <surname>Skidanov</surname>
            <given-names>RV</given-names>
          </string-name>
          .
          <article-title>Design and simulation of nonresonant 1-DOF drive mode and anchored 2-DOF sense mode gyroscope for implementation using UV-LIGA process</article-title>
          .
          <source>In: Proceedings of the SPIE 9807</source>
          ,
          <year>2016</year>
          ; DOI: 10.1117/12.2231372.
        </mixed-citation>
      </ref>
      <ref id="ref5">
        <mixed-citation>
          5.
          <string-name>
            <surname>Verma</surname>
            <given-names>P</given-names>
          </string-name>
          ,
          <string-name>
            <surname>Juneja</surname>
            <given-names>S</given-names>
          </string-name>
          ,
          <string-name>
            <surname>Savelyev</surname>
            <given-names>DA</given-names>
          </string-name>
          ,
          <string-name>
            <surname>Khonina</surname>
            <given-names>SN</given-names>
          </string-name>
          ,
          <string-name>
            <surname>Gopal</surname>
            <given-names>R</given-names>
          </string-name>
          .
          <article-title>Design and fabrication of a 1- DOF drive mode and 2-DOF sense mode micro-gyroscope using SU-8 based UV-LIGA process</article-title>
          .
          <source>In: Proceedings of the AIP 1724</source>
          ,
          <year>2016</year>
          ; DOI: 10.1063/1.4945137.
        </mixed-citation>
      </ref>
      <ref id="ref6">
        <mixed-citation>
          6.
          <string-name>
            <surname>Sung</surname>
            <given-names>WT</given-names>
          </string-name>
          ,
          <string-name>
            <surname>Kang</surname>
            <given-names>T</given-names>
          </string-name>
          ,
          <string-name>
            <surname>Lee</surname>
            <given-names>JG</given-names>
          </string-name>
          .
          <article-title>Controller design of a MEMS gyro-accelerometer with a single proof mass</article-title>
          .
          <source>International Journal of Control, Automation, and Systems</source>
          ,
          <year>2008</year>
          ;
          <volume>6</volume>
          (
          <issue>6</issue>
          ):
          <fpage>873</fpage>
          -
          <lpage>883</lpage>
          .
        </mixed-citation>
      </ref>
      <ref id="ref7">
        <mixed-citation>
          7.
          <string-name>
            <surname>Verma</surname>
            <given-names>P</given-names>
          </string-name>
          ,
          <string-name>
            <surname>Gopal</surname>
            <given-names>R</given-names>
          </string-name>
          ,
          <string-name>
            <surname>Arya</surname>
            <given-names>SK</given-names>
          </string-name>
          .
          <article-title>Analytical modeling and simulation of a 2-DOF drive and 1- DOF sense gyro-accelerometer</article-title>
          .
          <source>Microsystem Technologies</source>
          ,
          <year>2013</year>
          ;
          <volume>19</volume>
          (
          <issue>8</issue>
          ):
          <fpage>1238</fpage>
          -
          <lpage>1249</lpage>
          .
        </mixed-citation>
      </ref>
      <ref id="ref8">
        <mixed-citation>
          8.
          <string-name>
            <surname>Verma</surname>
            <given-names>P</given-names>
          </string-name>
          ,
          <string-name>
            <surname>Arya</surname>
            <given-names>SK</given-names>
          </string-name>
          ,
          <string-name>
            <surname>Gopal</surname>
            <given-names>R</given-names>
          </string-name>
          .
          <article-title>Lumped parameter analytic modeling and behavioral simulation of a 3-DOF MEMS gyro-accelerometer</article-title>
          .
          <source>Acta Mechanica Sinica</source>
          ,
          <year>2015</year>
          ;
          <volume>31</volume>
          (
          <issue>6</issue>
          ):
          <fpage>910</fpage>
          -
          <lpage>919</lpage>
          .
        </mixed-citation>
      </ref>
      <ref id="ref9">
        <mixed-citation>
          9.
          <string-name>
            <surname>Kazanskiy</surname>
            <given-names>NL</given-names>
          </string-name>
          .
          <article-title>Asymptotic research in computer optics</article-title>
          .
          <source>CEUR Workshop Proceedings</source>
          ,
          <year>2015</year>
          ;
          <volume>1490</volume>
          :
          <fpage>151</fpage>
          -
          <lpage>161</lpage>
          . DOI:
          <volume>10</volume>
          .18287/
          <fpage>1613</fpage>
          -0073-2015-1490-151-161.
        </mixed-citation>
      </ref>
      <ref id="ref10">
        <mixed-citation>
          10.
          <string-name>
            <surname>Doskolovich</surname>
            <given-names>LL</given-names>
          </string-name>
          ,
          <string-name>
            <surname>Moiseev</surname>
            <given-names>MA</given-names>
          </string-name>
          ,
          <string-name>
            <surname>Kazanskiy</surname>
            <given-names>NL</given-names>
          </string-name>
          .
          <article-title>On using a supporting quadric method to design diffractive optical elements</article-title>
          .
          <source>Computer Optics</source>
          ,
          <year>2015</year>
          ;
          <volume>39</volume>
          (
          <issue>3</issue>
          ):
          <fpage>339</fpage>
          -
          <lpage>346</lpage>
          . DOI:
          <volume>10</volume>
          .18287/
          <fpage>0134</fpage>
          -2452-2015-39-3-
          <fpage>339</fpage>
          -346.
        </mixed-citation>
      </ref>
      <ref id="ref11">
        <mixed-citation>
          11.
          <string-name>
            <surname>Kazanskiy</surname>
            <given-names>NL</given-names>
          </string-name>
          ,
          <string-name>
            <surname>Kharitonov</surname>
            <given-names>SI</given-names>
          </string-name>
          ,
          <string-name>
            <surname>Khonina</surname>
            <given-names>SN</given-names>
          </string-name>
          .
          <article-title>Simulation of a hyperspectrometer based on linear spectral filters using vector Bessel beams</article-title>
          .
          <source>Computer Optics</source>
          ,
          <year>2014</year>
          ;
          <volume>38</volume>
          (
          <issue>4</issue>
          ):
          <fpage>770</fpage>
          -
          <lpage>776</lpage>
          .
        </mixed-citation>
      </ref>
      <ref id="ref12">
        <mixed-citation>
          12.
          <string-name>
            <surname>Kazanskiy</surname>
            <given-names>NL</given-names>
          </string-name>
          ,
          <string-name>
            <surname>Serafimovich</surname>
            <given-names>PG</given-names>
          </string-name>
          .
          <source>Cloud Computing for Nanophotonic Simulations. Lecture Notes in Computer Science</source>
          ,
          <year>2013</year>
          ;
          <volume>7715</volume>
          :
          <fpage>54</fpage>
          -
          <lpage>67</lpage>
          . DOI:
          <volume>10</volume>
          .1007/978-3-
          <fpage>642</fpage>
          -38250-
          <issue>5</issue>
          _
          <fpage>7</fpage>
          .
        </mixed-citation>
      </ref>
      <ref id="ref13">
        <mixed-citation>
          13.
          <string-name>
            <surname>Golovashkin</surname>
            <given-names>DL</given-names>
          </string-name>
          ,
          <string-name>
            <surname>Kasanskiy</surname>
            <given-names>NL</given-names>
          </string-name>
          .
          <source>Solving Diffractive Optics Problem using Graphics Processing Units. Optical Memory and Neural Networks (Information Optics)</source>
          ,
          <year>2011</year>
          ;
          <volume>20</volume>
          :
          <fpage>85</fpage>
          -
          <lpage>89</lpage>
          . DOI:
          <volume>10</volume>
          .3103/S1060992X11020019.
        </mixed-citation>
      </ref>
      <ref id="ref14">
        <mixed-citation>
          14.
          <string-name>
            <surname>Verma</surname>
            <given-names>P</given-names>
          </string-name>
          ,
          <string-name>
            <surname>Gopal</surname>
            <given-names>R</given-names>
          </string-name>
          ,
          <string-name>
            <surname>Arya</surname>
            <given-names>SK</given-names>
          </string-name>
          .
          <article-title>Dynamic characteristics of vibratory gyro-accelerometer</article-title>
          .
          <source>In Proceeding of the IEEE, 5th International Conference on Computers and Devices for Communication</source>
          , University of Calcutta, India,
          <year>2012</year>
          ; DOI: 10.1109/ CODEC.
          <year>2012</year>
          .
          <volume>6509277</volume>
          .
        </mixed-citation>
      </ref>
      <ref id="ref15">
        <mixed-citation>
          15.
          <string-name>
            <surname>Verma</surname>
            <given-names>P</given-names>
          </string-name>
          ,
          <string-name>
            <surname>Agrawal</surname>
            <given-names>P</given-names>
          </string-name>
          ,
          <string-name>
            <surname>Gopal</surname>
            <given-names>R</given-names>
          </string-name>
          ,
          <string-name>
            <surname>Arya</surname>
            <given-names>SK</given-names>
          </string-name>
          .
          <article-title>Parametric sensitivity analysis of a 2-DOF drive and 1-DOF sense modes MEMS gyro-accelerometer structure</article-title>
          .
          <source>Advance Science Letters</source>
          ,
          <year>2014</year>
          ;
          <volume>20</volume>
          :
          <fpage>1495</fpage>
          -
          <lpage>1498</lpage>
          .
        </mixed-citation>
      </ref>
      <ref id="ref16">
        <mixed-citation>
          16.
          <string-name>
            <surname>Verma</surname>
            <given-names>P</given-names>
          </string-name>
          ,
          <string-name>
            <surname>Khan</surname>
            <given-names>KZ</given-names>
          </string-name>
          ,
          <string-name>
            <surname>Butt</surname>
            <given-names>MA</given-names>
          </string-name>
          ,
          <string-name>
            <surname>Khonina</surname>
            <given-names>SN</given-names>
          </string-name>
          ,
          <string-name>
            <surname>Kazanskiy</surname>
            <given-names>NL</given-names>
          </string-name>
          ,
          <string-name>
            <surname>Gopal</surname>
            <given-names>R</given-names>
          </string-name>
          .
          <article-title>Acceleration Characterization of Dual Purpose Gyro/Accelerometer Device using MS3110 Differential Capacitive Read Out IC</article-title>
          . In Proceeding of IEEE, MicroCom
          <year>2016</year>
          ,
          <string-name>
            <given-names>NIT</given-names>
            <surname>Durgapur</surname>
          </string-name>
          , India.
        </mixed-citation>
      </ref>
      <ref id="ref17">
        <mixed-citation>
          17.
          <string-name>
            <surname>Verma</surname>
            <given-names>P</given-names>
          </string-name>
          ,
          <string-name>
            <surname>Khan</surname>
            <given-names>KZ</given-names>
          </string-name>
          ,
          <string-name>
            <surname>Gopal</surname>
            <given-names>R</given-names>
          </string-name>
          ,
          <string-name>
            <surname>Butt</surname>
            <given-names>MA</given-names>
          </string-name>
          ,
          <string-name>
            <surname>Fomchenkov</surname>
            <given-names>SA</given-names>
          </string-name>
          ,
          <string-name>
            <surname>Savelyev</surname>
            <given-names>DA</given-names>
          </string-name>
          ,
          <string-name>
            <surname>Khonina</surname>
            <given-names>SN</given-names>
          </string-name>
          ,
          <string-name>
            <surname>Kazanskiy</surname>
            <given-names>NL</given-names>
          </string-name>
          ,
          <string-name>
            <surname>Skidanov</surname>
            <given-names>RV</given-names>
          </string-name>
          .
          <article-title>Analytical modeling of a non-resonant muti-DOF MEMS gyroaccelerometer</article-title>
          .
          <source>In Proceeding of the IEEE, ICECS</source>
          <year>2016</year>
          , Coimbatore, India.
        </mixed-citation>
      </ref>
    </ref-list>
  </back>
</article>