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    <journal-meta>
      <journal-title-group>
        <journal-title>October</journal-title>
      </journal-title-group>
    </journal-meta>
    <article-meta>
      <title-group>
        <article-title>MEASUREMENT OF BASIC STATIC CHARACTERISTICS (I-V, C-V) OF SILICON DETECTORS</article-title>
      </title-group>
      <contrib-group>
        <contrib contrib-type="author">
          <string-name>A.I. Sheremetyeva</string-name>
          <xref ref-type="aff" rid="aff0">0</xref>
          <xref ref-type="aff" rid="aff1">1</xref>
        </contrib>
        <contrib contrib-type="author">
          <string-name>E.A. Streletskaia</string-name>
          <xref ref-type="aff" rid="aff0">0</xref>
          <xref ref-type="aff" rid="aff1">1</xref>
        </contrib>
        <aff id="aff0">
          <label>0</label>
          <institution>Anastasia Sheremetyeva</institution>
          ,
          <addr-line>Ekaterina Streletskaia</addr-line>
        </aff>
        <aff id="aff1">
          <label>1</label>
          <institution>Joint Institute for Nuclear Research</institution>
          ,
          <addr-line>6 Joliot-Curie St, Dubna, Moscow region, 141980</addr-line>
          ,
          <country country="RU">Russia</country>
        </aff>
      </contrib-group>
      <pub-date>
        <year>2019</year>
      </pub-date>
      <volume>4</volume>
      <issue>2019</issue>
      <fpage>428</fpage>
      <lpage>433</lpage>
      <abstract>
        <p>The use of microstrip detectors in developing coordinate track systems for HEP experiments with high geometric efficiency (~100%), a large number of strips (measuring channels) over 106 and accuracy a/√12 (a-pitch) requires careful preliminary selection of detectors by main parameters. The main static parameters of silicon microstrip detectors are as follows: I-V characteristic determines the amount of dark leakage current of a silicon detector. C-V characteristic allows defining the full depletion voltage and the value of the capacitance of both the strip and detector.</p>
      </abstract>
      <kwd-group>
        <kwd>Double sided Si-microstrip detector</kwd>
        <kwd>CBM</kwd>
      </kwd-group>
    </article-meta>
  </front>
  <body>
    <sec id="sec-1">
      <title>-</title>
      <p>1. The need to measure basic static parameters of silicon detectors</p>
      <p>The use of double sided microstrip silicon detectors (DSSD) to establish precision coordinate
planes for internal trackers of the BM@N, MPD, SPD, experiments for the NICA complex (JINR) and
for the CBM experiment (GSI) requires careful preliminary selection of the detectors for the main
parameters.</p>
      <p>The current-voltage characteristic (I-V) determines the value of the dark leakage current
DSSD, which integrally characterizes the quality and determines the possibility of using this detector
in further process of developing a coordinate plane.</p>
      <p>The capacitance-voltage characteristic (C-V) makes it possible to determine the full depletion
voltage Ufd and the capacitance of the strip and the entire detector.</p>
      <p>
        AC-coupling DSSD (Hamamatsu) were measured for the CBM experiment with a size of
62×22 mm2 (Fig.1). The total number of strips is 1024, the chip thickness 300 μm, the strip pitch 58
μm, the strip implant width 10 μm, the strip metal width 20 μm, the strip angle of P side is 7,5˚, the
strip angle of N side is 0˚[
        <xref ref-type="bibr" rid="ref1">1</xref>
        ].
      </p>
      <p>For detectors with AC-coupling topology, an important parameter is the value of the leakage
currents of integration capacitors (Id≤10-12A). Leakage currents flow through the inputs of low-noise
charge-sensitive amplifiers of integrated specialized FE-chips (Fig.2). The larger capacitor leakage
currents, the higher the noise level in this channel is. It is necessary to identify and enter such strips
into the database so that then these channels are not connected to FE-chips or, if there are a large
number of such channels, this detector is excluded from the assembly.
2. Instruments for measuring basic static characteristics of microstrips
detectors</p>
      <p>
        Modern systems for testing and selecting microstrip detectors allow automatic identification of
strips with large dark currents, short circuits, and interstrip metallization breaks [
        <xref ref-type="bibr" rid="ref2">2</xref>
        ].
      </p>
      <p>With the joint cooperation of LHEP (JINR), SINP (MSU) and Planar (Minsk), an automated
measuring complex was developed for testing this type of the detector (Fig.3), which consists of the
following parts:
1. EM-6190 probe automat with a coordinate table, positioning accuracy of 8 μm;
2. Probe card with 12 probes, probe pitch 58 μm;
3. Microscope equipped with an electronic vision device;
4. Programmable switching matrix of signals Keithley 708B;
5. LCR meter AM-3016;
6. Keithley 6487 picoammeter with built-in controlled voltage source in the range (0,0002÷505</p>
      <p>V) for both voltage polarities;
7. Picoammeter Keithley 6485;
8. The software package “DMS” for controlling the measuring complex.</p>
      <p>The probe automate EM-6190A is designed for an accurate automatic positioning of the
measured detector relative to the probe card and for ensuring electrical contact of the measuring
probes with contact pads on the detector strips.</p>
      <p>The measuring complex is controlled with the help of the DMS software package. The
program connects measuring instruments through the switch to measure the required detector
parameters and saves the received data in the TXT files.
3. Measurement results</p>
      <p>The basic static characteristic of the microstrip detector is the current-voltage characteristic,
which is the dependence of the current on the voltage applied to it.</p>
      <p>According to the specification requirements for the Hamamatsu detectors with the dimensions
of 62×22×0,3 mm3, the value of the dark current detector should not exceed 0,8 μA at a voltage of 150
V and temperature of measurement +20˚C. The I-V characteristic of the CBM62HDS0424 sensor
(Fig.4) clearly shows the current value at a voltage of 150 is 183,8 nA, which meets the requirements
of the specification.
  =</p>
      <p>2</p>
      <p>Figure 5 shows the measured (C-V characteristic) dependence C = f(U), black. The calculated
dependence C-2 = f(U) is shown in blue, from which the full depletion detector is determined from the
position of the intersection point of two straight lines of the graph linear approximation. For this
detector, full depletion voltage is Ufd = 44 V and the geometric capacitance of the detector Cfd = 399,9
pF corresponds to it.</p>
      <p>This detector with such parameters complies with the specifications of the CBM experiment
and can enter the assembly process of working coordinate modules. After measuring the general
parameters of the detector, in accordance with their specifications, more complex and time-consuming
measurements of the leakage currents of the integral separation capacitors of each of the 1024 strips
are continued, they are necessary to detect noisy channels. Below are the graphs with the results of
data processing for 40 pcs = 40 880 strips (p+) + 40 880 strips (n+).</p>
      <p>Histograms (Fig. 6) show that on the P-side the strip current at a voltage of 10 and 20 V does
not exceed 0,3 pA. Histograms (Fig. 7) show that on the N-side the strip current at a voltage of 10
and 20 V does not exceed 0,9 pA.</p>
      <p>From the obtained measurement results of more than 80 thousand integral isolation capacitors,
it can be concluded that Hamamatsu detectors with dimensions (62x22x0.3) mm3 have small leakage
currents at a voltage of 20 V and will not contribute to noise.</p>
      <p>Histogram (Fig. 8) shows that on the P-side, the capacitance of integrated capacitors does
not exceed 32 pF. The capacitance value is less than 30 pF, due to the presence of short strips on the
P-side of the detector. The total number of short strips is 78 on both sides of P-side.</p>
      <p>Histogram (Fig. 9) shows that on the N-side, the capacitance of integrated capacitors does
not exceed 30 pF.</p>
    </sec>
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</article>