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  <front>
    <journal-meta />
    <article-meta>
      <title-group>
        <article-title>Metadata Schema to support FAIR Data in Scanning Electron Microscopy</article-title>
      </title-group>
      <contrib-group>
        <contrib contrib-type="author">
          <string-name>Karlsruhe Institute of Technology</string-name>
          <xref ref-type="aff" rid="aff0">0</xref>
          <xref ref-type="aff" rid="aff1">1</xref>
          <xref ref-type="aff" rid="aff2">2</xref>
          <xref ref-type="aff" rid="aff3">3</xref>
          <xref ref-type="aff" rid="aff4">4</xref>
        </contrib>
        <contrib contrib-type="author">
          <string-name>Steinbuch Centre for Computing (SCC)</string-name>
          <xref ref-type="aff" rid="aff0">0</xref>
          <xref ref-type="aff" rid="aff2">2</xref>
          <xref ref-type="aff" rid="aff3">3</xref>
          <xref ref-type="aff" rid="aff4">4</xref>
        </contrib>
        <contrib contrib-type="author">
          <string-name>Hermann-von-Helmholtz-Platz</string-name>
          <xref ref-type="aff" rid="aff0">0</xref>
          <xref ref-type="aff" rid="aff1">1</xref>
          <xref ref-type="aff" rid="aff2">2</xref>
          <xref ref-type="aff" rid="aff3">3</xref>
          <xref ref-type="aff" rid="aff4">4</xref>
        </contrib>
        <contrib contrib-type="author">
          <string-name>Eggenstein-Leopoldshafen</string-name>
          <xref ref-type="aff" rid="aff0">0</xref>
          <xref ref-type="aff" rid="aff2">2</xref>
          <xref ref-type="aff" rid="aff3">3</xref>
          <xref ref-type="aff" rid="aff4">4</xref>
        </contrib>
        <contrib contrib-type="author">
          <string-name>Germany</string-name>
          <xref ref-type="aff" rid="aff0">0</xref>
          <xref ref-type="aff" rid="aff2">2</xref>
          <xref ref-type="aff" rid="aff3">3</xref>
          <xref ref-type="aff" rid="aff4">4</xref>
        </contrib>
        <contrib contrib-type="author">
          <string-name>reetu.joseph</string-name>
          <xref ref-type="aff" rid="aff0">0</xref>
          <xref ref-type="aff" rid="aff2">2</xref>
          <xref ref-type="aff" rid="aff3">3</xref>
          <xref ref-type="aff" rid="aff4">4</xref>
        </contrib>
        <contrib contrib-type="author">
          <string-name>rossella.aversa}@kit.edu</string-name>
          <xref ref-type="aff" rid="aff0">0</xref>
          <xref ref-type="aff" rid="aff2">2</xref>
          <xref ref-type="aff" rid="aff3">3</xref>
          <xref ref-type="aff" rid="aff4">4</xref>
        </contrib>
        <aff id="aff0">
          <label>0</label>
          <institution>,</institution>
          ,
          <addr-line>Christian Lucas</addr-line>
        </aff>
        <aff id="aff1">
          <label>1</label>
          ,
          <addr-line>21502 Geesthacht</addr-line>
          ,
          <country country="DE">Germany</country>
        </aff>
        <aff id="aff2">
          <label>2</label>
          ,
          <addr-line>Aditya Chauhan</addr-line>
        </aff>
        <aff id="aff3">
          <label>3</label>
          ,
          <addr-line>Richard Thelen</addr-line>
        </aff>
        <aff id="aff4">
          <label>4</label>
          <institution>, Ute Ja ̈ntsch</institution>
        </aff>
        <aff id="aff5">
          <label>5</label>
          <institution>CEA Saclay, Service de Recherches de Met ́allurgie Physique (SRMP)</institution>
          ,
          <addr-line>91191 Gif-sur-Yvette</addr-line>
          ,
          <country country="FR">France</country>
        </aff>
        <aff id="aff6">
          <label>6</label>
          <institution>Consiglio Nazionale delle Ricerche - Istituto Oficina dei Materiali (CNR-IOM)</institution>
          ,
          <addr-line>Area Science Park, Strada Statale 14, km 163,5, 34149 Basovizza (Trieste)</addr-line>
          ,
          <country country="IT">Italy</country>
        </aff>
        <aff id="aff7">
          <label>7</label>
          <institution>Forschungszentrum Ju ̈lich, Institute of Advanced Simulation</institution>
          ,
          <addr-line>Materials Data Science and Informatics (IAS-9) Wilhelm-Johnen-Straße, 52425 Ju ̈lich</addr-line>
          ,
          <country country="DE">Germany</country>
        </aff>
        <aff id="aff8">
          <label>8</label>
          <institution>Helmholtz-Zentrum Hereon, Institute of Metallic Biomaterials</institution>
          ,
          <addr-line>Max-Planck-Straße</addr-line>
        </aff>
        <aff id="aff9">
          <label>9</label>
          <institution>Karlsruhe Institute of Technology, Institute for Applied Materials- Applied Materials Physics (IAM-AWP)</institution>
          ,
          <addr-line>Hermann-von-Helmholtz-Platz 1, 76344 Eggenstein-Leopoldshafen</addr-line>
          ,
          <country country="DE">Germany</country>
        </aff>
        <aff id="aff10">
          <label>10</label>
          <institution>Karlsruhe Institute of Technology, Institute for Biological and Chemical Systems - Functional Molecular Systems (IBCS-FMS)</institution>
          ,
          <addr-line>Hermann-von-Helmholtz-Platz 1, 76344 Eggenstein-Leopoldshafen</addr-line>
          ,
          <country country="DE">Germany</country>
        </aff>
        <aff id="aff11">
          <label>11</label>
          <institution>Karlsruhe Institute of Technology, Institute of Microstructure Technology (IMT)</institution>
          ,
          <addr-line>Hermann-von-Helmholtz-Platz 1, 76344 Eggenstein-Leopoldshafen</addr-line>
          ,
          <country country="DE">Germany</country>
        </aff>
        <aff id="aff12">
          <label>12</label>
          <institution>Karlsruhe Institute of Technology, Institute of Nanotechnology (INT)</institution>
          ,
          <addr-line>Hermann-von-Helmholtz-Platz 1, 76344 Eggenstein-Leopoldshafen</addr-line>
          ,
          <country country="DE">Germany</country>
        </aff>
        <aff id="aff13">
          <label>13</label>
          <institution>Karlsruhe Institute of Technology, Karlsruhe Nano Micro Facility (KNMF)</institution>
          ,
          <addr-line>Hermann-von-Helmholtz-Platz 1, 76344 Eggenstein-Leopoldshafen</addr-line>
          ,
          <country country="DE">Germany</country>
        </aff>
        <aff id="aff14">
          <label>14</label>
          <institution>Technical University Darmstadt, Department of Materials &amp; Earth Sciences</institution>
          ,
          <addr-line>Alarich-Weiss-Straße 2, 64287 Darmstadt</addr-line>
          ,
          <country country="DE">Germany</country>
        </aff>
      </contrib-group>
      <fpage>0000</fpage>
      <lpage>0002</lpage>
      <abstract>
        <p>The development and the adoption of metadata schemas and standards are a key aspect in data management. In this paper, we introduce our approach to a metadata model in the field of Materials Science. We present the specific use case of a metadata schema for Scanning Electron Microscopy, a characterization technique which is routinely used in Materials Science. This metadata schema is aiming to be a de-facto stan-</p>
      </abstract>
    </article-meta>
  </front>
  <body>
    <sec id="sec-1">
      <title>-</title>
      <p>dard which will be openly available for reuse and further extension to
other electron microscopy techniques.
1</p>
    </sec>
    <sec id="sec-2">
      <title>Introduction</title>
      <p>Research in Materials Science is gaining more importance than ever, with
applications ranging from the nanometer scale up to large meter-sized structures.
Investigation of the structural, chemical, magnetic or optical properties and
connection with the underlying microstructural aspects through detailed
characterization have enabled the development of advanced materials with superior
properties and functions. This, in turn, has made it possible to unravel
hidden mysteries pertaining to surprising behaviors and to the invention of new
materials. The huge number of experimental and computational techniques to
study, characterize, and predict properties of materials results in a large variety
of datasets and representations.</p>
      <p>
        Materials Science is a highly multi-disciplinary research field where scientists
often need to access data from more than one discipline in order to properly
characterize materials, to understand the governing mechanisms, to answer
critical research questions and to design novel materials. This aspect is particularly
important in correlative characterization, where the task is to combine
diferent types of information from co-referenced (in time or space) multi-dimensional
data obtained using diferent measurement techniques. Each of these methods
results in datasets that have to be combined and correlated in order to fully
characterize materials and thereby to relate features and properties of diferent
sample areas, across multiple length scales, or on diferent time scales. The
exchange and combination of information can be facilitated if the FAIR (Findable,
Accessible, Interoperable, Reusable) data principles [
        <xref ref-type="bibr" rid="ref51">51</xref>
        ] are considered for the
output of the measurement data.
      </p>
      <p>
        Many groups within the broad field of Materials Science are already
developing metadata schemas and ontologies, driven by their individual organizational
goals and guided by the open and FAIR data initiatives (e.g., EOSC [
        <xref ref-type="bibr" rid="ref14">14</xref>
        ],
Horizon 2020 [
        <xref ref-type="bibr" rid="ref24">24</xref>
        ], Horizon Europe [
        <xref ref-type="bibr" rid="ref16">16</xref>
        ], Turning FAIR into reality [
        <xref ref-type="bibr" rid="ref17">17</xref>
        ]). However,
to promote interoperability, a harmonization approach to find a common
description of the data coming from the measurements needs to be developed and
should be adopted as far as possible.
      </p>
      <p>
        Motivated by this, we started a coordination efort between the two projects
we are directly involved in: the NFFA (Nanoscience Foundries and Fine Analysis)
EUROPE Pilot (NEP) [
        <xref ref-type="bibr" rid="ref38">38</xref>
        ] and the Joint Lab “Integrated Model and Data
Driven Materials Characterization” (MDMC) of the Helmholtz Association [
        <xref ref-type="bibr" rid="ref22">22</xref>
        ].
Our final objective is to describe the entire workoflw of an experimental project,
providing rich metadata to make data interoperable. This is an incremental
process; as a first use case, we developed a metadata schema to describe Scanning
Electron Microscopy (SEM) measurements. This schema is aiming to become a
de-facto standard for SEM and to pave the way towards further extension to
other electron microscopy techniques.
2
2.1
      </p>
    </sec>
    <sec id="sec-3">
      <title>Approach and Methodology</title>
      <sec id="sec-3-1">
        <title>The Approach to a Communal Model</title>
        <p>
          Any metadata model represents a simplified and idealized subset of the
reality. The particular choice of the idealization depends on the specific purpose of
the model. To be able to design a communal model, we compared the aims of
the two above mentioned projects [
          <xref ref-type="bibr" rid="ref22 ref38">38, 22</xref>
          ]: NEP users are interested in
tracking the lifecycle of data that are collected in nanoscience experiments and then
get archived [
          <xref ref-type="bibr" rid="ref4">4</xref>
          ]; the Joint Lab MDMC focuses on correlative characterization,
which implies to conduct experiments and to put into relation diferent results.
It appears very clearly that the two communities share a similar need, which can
be satisefid by the proposed metadata model: a contextually rich description of
the experimental lifecycle, from sample preparation to data analysis, which we
define as a study following the core concept in [
          <xref ref-type="bibr" rid="ref33">33</xref>
          ].
        </p>
        <p>Figure 1 shows the basic steps of a simple study, in which only a single
measurement is performed. In reality, measurements from two or more diferent
techniques are usually engaged; however, the steps involved in the workflow
for each of them remain the same. At each stage of the process, we expect to
collect the appropriate metadata describing the context of the experiment at
that particular phase.</p>
        <p>In this work, we focus on describing a measurement (green box in the second
block in Figure 1), which is usually performed using an instrument (yellow box
in the second block) to measure a sample (light blue circle in the second block)
and to generate raw data (light blue circle in the third block). In section 3 we
will show how this structure can be applied to the specific SEM use case.
2.2</p>
      </sec>
      <sec id="sec-3-2">
        <title>The State-of-the-Art Landscape</title>
        <p>
          We surveyed the current landscape, looking for existing schemas or standards
we could adopt. The well known high level schemas, such as crossref [
          <xref ref-type="bibr" rid="ref7">7</xref>
          ], Dublin
Core Metadata Element Set [
          <xref ref-type="bibr" rid="ref10">10</xref>
          ], DataCite [
          <xref ref-type="bibr" rid="ref36">36</xref>
          ] and schema.org [
          <xref ref-type="bibr" rid="ref45">45</xref>
          ], are intended
to be generic, rather than customized to the needs of any particular discipline.
Nevertheless, community eforts to extend schema.org to the field of Materials
Science are currently under development [
          <xref ref-type="bibr" rid="ref46">46</xref>
          ].
        </p>
        <p>
          A particularly interesting core model is the Core Scientific Metadata Model
(CSMD) [
          <xref ref-type="bibr" rid="ref33 ref49">33, 49</xref>
          ], which is oriented towards Facilities Science, to capture high
level information about scientific studies and the produced data. Some elements
of CSMD also occur in the first version of the NFFA-Europe metadata
framework [
          <xref ref-type="bibr" rid="ref4">4</xref>
          ], which we used as the basis for our model shown in Figure 1. Schemas
such as the Open Geospatial Consortium (OGC) SensorML [
          <xref ref-type="bibr" rid="ref2">2</xref>
          ] and the Alfred
sample preparation
instrument
        </p>
        <p>nal
specimen
instrument
measurement</p>
        <p>raw data
data processing
data analysis</p>
        <p>
          analysed data
software
software
Wegener Institute (AWI) Sensor Information System [
          <xref ref-type="bibr" rid="ref47">47</xref>
          ] provide a conceptual
model and a technical metadata description, as well as eXtensible Markup
Language (XML) and JavaScript Object Notation (JSON) encodings for metadata
of sensors and measurement processes. In addition to that, the Research Data
Alliance (RDA) [
          <xref ref-type="bibr" rid="ref42">42</xref>
          ] “Persistent Identification of Instruments” (PIDINST)
Working Group facilitates a community-driven solution for persistent identicfiation of
instruments [
          <xref ref-type="bibr" rid="ref48">48</xref>
          ]. In our schema, we describe the instrument metadata to be
compliant with the PIDINST schema, where applicable.
        </p>
        <p>
          We also reviewed the state of Electron Microscopy initiatives with the hope
of reusing existing schemas describing the SEM technique; while there are a
number of valuable eforts such as [
          <xref ref-type="bibr" rid="ref18 ref40 ref41 ref44 ref8">8, 41, 40, 44, 18</xref>
          ], none of them is fully in line
with the purpose of our schema. In particular, the Electron Microscopy Public
Image Archive (EMPIAR) schema [
          <xref ref-type="bibr" rid="ref28">28</xref>
          ] is designed to describe image sets; SEM
appears here as a technique used to produce the raw data, but apart from the
pixel size no additional instrument settings are included. A more exhaustive
description of SEM appears in the NanoMine XML schema [
          <xref ref-type="bibr" rid="ref53">53</xref>
          ] as specification
of the materials characterization equipment used, methods and experimental
conditions. The main focus of this schema is on the representation of polymer
nanocomposites and not so much on instrument description.
        </p>
        <p>
          Core and domain-specific controlled vocabularies (e.g., [
          <xref ref-type="bibr" rid="ref1 ref19 ref37">37, 19, 1</xref>
          ]) and
ontologies (e.g., [
          <xref ref-type="bibr" rid="ref15 ref6">15, 6</xref>
          ]) in the Materials Science and Engineering community also
exist. In particular, MatONTO [
          <xref ref-type="bibr" rid="ref5">5</xref>
          ] is developed to represent materials,
properties, structures, and processes in the Materials Science domain. Moreover, it
leverages and maps the available metadata, e.g. the Crystallographic Information
Framework (CIF) dictionary [
          <xref ref-type="bibr" rid="ref8">8</xref>
          ], into an ontology module. The authors in [
          <xref ref-type="bibr" rid="ref52">52</xref>
          ]
developed an ontology based on MatML [
          <xref ref-type="bibr" rid="ref32">32</xref>
          ] to enable the data interoperability
and exchange. Another ongoing efort to develop a core ontology in Materials
Science is the European Materials and Modelling Ontology (EMMO) [
          <xref ref-type="bibr" rid="ref13">13</xref>
          ]
developed by the European Materials Modelling Council (EMMC) [
          <xref ref-type="bibr" rid="ref12">12</xref>
          ]. It provides a
common semantic framework for describing materials, models, and data with the
possibility to extend and adapt it to other domains. The recent work in [
          <xref ref-type="bibr" rid="ref25">25</xref>
          ] has
shown the development of a level-domain ontology of crystalline materials
defects (i.e., a dislocation ontology). Even though we do not exclude the possibility
to consider such eforts in future extensions, e.g. mapping and re-engineering the
schemas into an ontology, we currently focused on a metadata schema describing
SEM measurements.
        </p>
        <p>
          In this context, a promising initiative is NeXus [
          <xref ref-type="bibr" rid="ref30">30</xref>
          ], which was originally
developed as an international standard for neutron, X-ray and muon facilities,
with major focus on recording data directly taken from experimental equipment.
The NeXus data format ofers a flexible metadata structure, together with an
extendable glossary of domain-specific terms. In our schema, we attempted to
adhere to the NeXus naming convention as much as possible, and thereby to
allow basic interoperability.
3
3.1
        </p>
        <p>The SEM</p>
      </sec>
    </sec>
    <sec id="sec-4">
      <title>Metadata Schema</title>
      <sec id="sec-4-1">
        <title>The Implementation</title>
        <p>
          The proposed schema is constructed as a hierarchy of relevant information
blocks, which we call groups, resembling the NeXus groups [
          <xref ref-type="bibr" rid="ref30">30</xref>
          ] and adopting
NeXus naming convention, when applicable. Figure 2 shows how the hierarchy
of the groups is structured in the SEM schema. In Section 3.2 all the elements
used in each group are reported.
        </p>
        <p>
          Many integrations to the NeXus model have been done, in particular on the
description of the dimensional quantities, which should contain at least value,
uncertainty, and units. We defined all these quantities using a complex type
dimensionalDetail, which we adopted from the MatML schema [
          <xref ref-type="bibr" rid="ref32">32</xref>
          ] and can
be mapped onto the schema.org [
          <xref ref-type="bibr" rid="ref45">45</xref>
          ] QuantitativeValue. It is worth mentioning
that the similar complex type ScalarUncertainty in Nanomine [
          <xref ref-type="bibr" rid="ref53">53</xref>
          ] contains
an element called data, which describes the data distribution. This does not
ift in our SEM schema, however it might be relevant in future extensions to
spectroscopy. It is worth noticing that we decided to denfie a specific type for
each quantity rather than a unique one, in order to provide a controlled list of
allowed values and a default value. The complete XML implementation can be
found at [
          <xref ref-type="bibr" rid="ref34">34</xref>
          ].
        </p>
        <p>
          Each property of the type identifier resembles the PIDINST [
          <xref ref-type="bibr" rid="ref48">48</xref>
          ] structure,
including both an identifierValue and an identifierType, such as URL,
ROR [
          <xref ref-type="bibr" rid="ref43">43</xref>
          ], GRID [
          <xref ref-type="bibr" rid="ref20">20</xref>
          ], ISNI [
          <xref ref-type="bibr" rid="ref27">27</xref>
          ], DOI [
          <xref ref-type="bibr" rid="ref9">9</xref>
          ], Handle [
          <xref ref-type="bibr" rid="ref21">21</xref>
          ]. Including ROR IDs in
metadata potentially enables more eficient discovery and tracking of
publications by institutions and makes unambiguous afiliation information widely and
freely available.
user
instrument
sample
eBeam
Source
stage
imaging
detector
        </p>
        <p>eBeam</p>
        <p>
          Deceleration
detector 1
detector 2
In this Section, we describe each of the main groups constituting the SEM
schema. The hierarchy of these groups is illustrated in Figure 2. The complete
XML implementation of the schema can be found at [
          <xref ref-type="bibr" rid="ref34">34</xref>
          ].
        </p>
        <p>
          The entry level. The entry level is the root element of the schema, and
resembles the NeXus [
          <xref ref-type="bibr" rid="ref30">30</xref>
          ] NXentry base class definition. It contains all the metadata
describing a single measurement. Being the design of the schema modular, an
entry for each measurement can be included in case of multiple measurements.
The user group. The user group contains the contact information of the
user responsible for the measurement. The design of the schema is modular:
if more than one user is involved, it is possible to add as many user groups as
needed. The metadata properties have been selected from the NeXus [
          <xref ref-type="bibr" rid="ref30">30</xref>
          ] NXuser
group, adopting the same naming convention. it is worth noticing that our user
properties map well to the ones of DataCite [
          <xref ref-type="bibr" rid="ref36">36</xref>
          ] Contributor.
        </p>
        <p>
          To indicate the role of the user, the role property is included with a
controlled list of values which have been selected from DataCite [
          <xref ref-type="bibr" rid="ref36">36</xref>
          ] and adapted
to the specific needs of our projects: in particular, we mapped Project Leader
to Principal Investigator and we created a new definition for Work Package
        </p>
        <p>
          FIB
iBeam
Source
Leader fitting our context. A Common Vocabulary for Nanoscience Data
Management was already developed for NFFA-Europe [
          <xref ref-type="bibr" rid="ref4">4</xref>
          ]: from there, we adopted
the definitions of Instrument Scientist and Research User. One new term
(Site Leader) was recently added to meet the requirements of the NEP project.
In the following, we list the definitions which difer from DataCite:
– Instrument Scientist: A person, or a group of them, who manage a
particular instrument, or a set of them [
          <xref ref-type="bibr" rid="ref4">4</xref>
          ]. This is the person who usually performs
the measurement and possibly the data analysis;
– Research User: A person, a group of them, or an institution (organization)
who, within a project, conducts experiment on one or more laboratories
using one or more instruments in order to collect and analyze research data,
or is interested in data collected or analyzed by other research users on the
same or other laboratories. Research User may be assigned with a role, e.g.
a designation as Principal Investigator [
          <xref ref-type="bibr" rid="ref4">4</xref>
          ];
– Site Leader: A person in charge of a measurement technique at the location
of a laboratory;
– Work Package Leader: A person responsible for the coordination,
supervision, and implementation of the specific activities in the project.
        </p>
        <p>
          The details of the user afiliation have been selected from the Crossref schema
version 5.0 [
          <xref ref-type="bibr" rid="ref7">7</xref>
          ] and are listed in a subgroup called affiliation.
The sample group. The sample group includes any information describing
the sample on which the measurement is performed, similar to the NeXus [
          <xref ref-type="bibr" rid="ref30">30</xref>
          ]
NXsample group. Depending on the particular research context, multiple sample
groups can be added to the same measurement.
        </p>
        <p>
          We intentionally did not cover any details on material structure or properties,
as many ontologies exist already for this purpose. In future developments, a
standardized description of the material is going to be included. A promising
option seems to be the Materials Science and Engineering related vocabulary [
          <xref ref-type="bibr" rid="ref1">1</xref>
          ]
currently used in the Materials Resource Registry [
          <xref ref-type="bibr" rid="ref31">31</xref>
          ], which was developed at
the National Institute of Standards and Technology (NIST) [
          <xref ref-type="bibr" rid="ref39">39</xref>
          ] and through
the RDA [
          <xref ref-type="bibr" rid="ref42">42</xref>
          ] “International Materials Resource Registry” Working Group [
          <xref ref-type="bibr" rid="ref26">26</xref>
          ].
The instrument group. The instrument group describes the collection of the
components of the instrument. Following the NeXus design [
          <xref ref-type="bibr" rid="ref30">30</xref>
          ], each component
is by itself a group, as sketched in Figure 2, and will be described separately in
the following. This structure has many advantages: it makes the schema modular,
lfexible, and easily extendable. Moreover, we included the unique identification of
the detectors (via detectorID) and the componentGeometry, which ofers a way
to put into relation the coordinates within the Cartesian coordinate system of
the laboratory, which we term the global coordinate system. Positions, directions,
coordinates, uncertainties, and units refer to this coordinate system unless stated
otherwise.
The source group. The source group gives details about a beam source. It
is designed to be reused in multiple contexts, as the structure of the schema is
lfexible: in our case, we use it to describe both the electron beam source in the
instrument group and the ion beam source in the FIB group (see Figure 2).
The stage group. The stage group is a required group describing the stage
settings during a measurement. As it is not included in the NeXus design [
          <xref ref-type="bibr" rid="ref30">30</xref>
          ],
the selection of the appropriate properties and their names was based on the
user experience and on the comparison of the metadata provided by diferent
manufacturers.
        </p>
        <p>
          The imaging group. The imaging group lists the imaging settings of the
instrument during the measurement. It does not describes the output file, as e.g. the
EMPIAR schema [
          <xref ref-type="bibr" rid="ref28">28</xref>
          ]; it rather includes properties such as isCorrelationImage
to indicate whether the image produced in the measurement is used for
correlation with another image. If so, coordinates is useful to make the images refer
to the same global coordinate system.
        </p>
        <p>
          The detector group. The detector group describes the details and the
settings of the detector used during the measurement. If multiple detectors are
used, they can be put under the detectors group (see Figure 2), reflecting the
NeXus design [
          <xref ref-type="bibr" rid="ref30">30</xref>
          ]. The SEM schema contains at least one detector, with the
further option to include a second one in case of signal mixing. The metadata
properties of this group were tailored to be applicable for all kinds of detectors
that can be mounted on the SEM, such as detectors for Energy-Dispersive X-ray
Spectroscopy (EDS) or Wavelength-Dispersive X-Ray Spectroscopy (WDS).
The eBeamDeceleration group The eBeamDeceleration group is an optional
group describing the settings of the deceleration applied to the electron beam,
if any.
        </p>
        <p>The FIB group. The Focused Ion Beam (FIB) group describes the details and
the settings of the FIB system attached to the SEM, if any. Among the metadata
properties, the gasInjectionSystem subgroup provides the option to include the
details of a gas injection system (GIS) which can be used for deposition, charge
compensation or enhanced milling. As shown in Figure 2, an optional source
group describing the ion beam source may be added.
4</p>
      </sec>
    </sec>
    <sec id="sec-5">
      <title>Discussion</title>
      <p>Scanning Electron Microscopy is an almost ubiquitous characterization
technique: in the NEP consortium, 16 partner institutes out of 22 have an SEM
in their laboratories, and within the Helmholtz Joint Lab MDMC the ratio is
comparable. A very similar situation can be probably found in any Materials
Science related laboratory involved in experimental characterization. Thus, a
schema tailored for SEM is strategic and of great importance: currently, it can
be seen as the only feasible way to systematically and consistently reproduce
or reuse SEM measurement data. Such a schema also represents the first step
towards true interoperability among diferent characterization techniques.</p>
      <p>Nonetheless, a number of practical challenges exist: e.g., diferent
manufacturers have diferent ways to provide metadata; dealing with data produced by
multiple instruments may become problematic, even more so when trying to
closely relate them to each other, as it happens in correlative characterization.
The proposed schema is cross-platform and includes options to account for the
variation in settings between diferent models; the future use of a vocabulary
service will ease the mapping of metadata used by diferent manufacturers and,
in turn, the exchange of data between communities which still have their own
terminology.</p>
      <p>A positive aspect of our schema is that it is flexible and adaptable, suiting
the needs of the Materials Science community. For instance, an instrument can
be upgraded by mounting extra detectors or sources. Our modular design ofers
the possibility to include additional groups in order to accommodate further
extensions and system upgrades. Moreover, the suggested properties allow for a
versatile description. As an example, the same schema can cover measurements
performed in diferent configurations: SEM (secondary electron or back-scattered
electron), EDS, WDS, cathodoluminescence or environmental-SEM (e-SEM).</p>
      <p>
        Having a rich metadata description ofers many advantages to the users, but
might also be demanding. First of all, the sheer number of parameters to be set
can be overwhelming. To tackle this issue, many fields can be automated to take
input from an Electronic Lab Notebook (ELN). Chemotion [
        <xref ref-type="bibr" rid="ref50">50</xref>
        ], Kadi4Mat [
        <xref ref-type="bibr" rid="ref3">3</xref>
        ],
eLabFTW [
        <xref ref-type="bibr" rid="ref11">11</xref>
        ] and the Hereon ELN under development at the Helmholtz-Centre
Hereon [
        <xref ref-type="bibr" rid="ref23">23</xref>
        ] seem promising tools to be adopted within our projects to digitize
the process of recording the metadata associated with a measurement.
      </p>
      <p>
        If such an ELN is not available, the individual metadata properties have to
be entered manually, representing a demanding task for the user. A Graphical
User Interface (GUI) would provide a simple access point, and the integration
of a metadata editor [
        <xref ref-type="bibr" rid="ref29">29</xref>
        ] would facilitate the user in filling the fields as well as
in validating the metadata document against the provided schema.
      </p>
      <p>
        To simplify the introduction of a new data management practice for the users,
the current number of required properties in our schema is intentionally limited;
an example of a metadata document containing only required fields is available
at [
        <xref ref-type="bibr" rid="ref34">34</xref>
        ]. Moreover, controlled lists are implemented and default values are
preentered for most parameters. This choice, based on user experience, limits the
lfexibility but facilitates adoption and semantic interoperability. New values in
the controlled lists could be added in future, to meet the needs of the community.
      </p>
      <p>It is worth mentioning that unique URIs for metadata elements can constitute
a basis for the further sharing of data records as Linked Open Data, although
the actual implementation of it is beyond the scope of this work.</p>
    </sec>
    <sec id="sec-6">
      <title>Conclusion</title>
      <p>The schema presented in this paper ofers an efective description of SEM
measurements, striking a balance between the necessary and available
instrumental parameters. The implementation is based on the experience of more than
ten expert users from five diferent institutes, spanning across three countries.
By trying to bring a consensus among multiple research groups working
independently of each other, this schema accommodates the needs of the Materials
Science community in an inclusive way.</p>
      <p>The result we presented provides a missing middle layer in data
management, which fills the gap between high-level core schemas and extremely detailed
discipline-specific ontologies. To ensure reusability, reproducibility and
interoperability, we adopted already existing terminologies to a great extent, as reported
in Sections 2 and 3.</p>
      <p>
        As a matter of fact, a standard way to describe measurement techniques in
Materials Science is strongly needed. We suggest that our metadata schema may
act as a first de-facto standard in this direction. To improve its visibility and
promote its adoption, we plan to register it to the RDA Metadata Standard
Catalogue [
        <xref ref-type="bibr" rid="ref35">35</xref>
        ].
      </p>
      <p>
        As a next step, we aim at extending the structure of this schema to other
characterization techniques such as Transmission Electron Microscopy (TEM),
Scanning Transmission Electron Microscopy (STEM), Atomic Force Microscopy
(AFM), Scanning Tunneling Microscopy (STM), Secondary Ion Mass
Spectrometry (SIMS) and Atom Probe Tomography (APT), which are ofered in the
NEP [
        <xref ref-type="bibr" rid="ref38">38</xref>
        ] and MDMC [
        <xref ref-type="bibr" rid="ref22">22</xref>
        ] catalogues. This will pave the way to a broad variety
of new applications in materials characterization, which would be dificult to
manage and to automate otherwise.
      </p>
      <p>
        Our work on metadata schemas is continuing, as well as the activity to receive
feedback and create consensus in the Materials Science community. It is our
intention to improve and maintain this schema, by integrating the use of the
metadata to be compliant with new recommendations or standards which may
be established, e.g. from RDA [
        <xref ref-type="bibr" rid="ref42">42</xref>
        ] or NIST [
        <xref ref-type="bibr" rid="ref39">39</xref>
        ].
      </p>
      <p>Acknowledgements. This work has been supported by the Joint Lab
“Integrated Model and Data Driven Materials Characterization” (MDMC), the
research programs “Engineering Digital Futures” and “Materials System
Engineering” of the Helmholtz Association of German Research Centers and the
Helmholtz Metadata Collaboration Platform.</p>
      <p>This project has received funding from the European Union’s Horizon 2020
research and innovation programme under grant agreement No. 101007417 within
the framework of the NFFA-Europe Pilot (NEP) Joint Activities.</p>
      <p>A.I. and S.S. acknowledge financial support from the European Research
Council through the ERC Grant Agreement No. 759419 MuDiLingo.</p>
    </sec>
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