{"labels":{"en":"Information System for Design of Thin Multilayer Film Processes Parameters Management based on Diffusion"},"descriptions":{"en":"scientific paper published in CEUR-WS Volume 3896"},"claims":{"P31":"Q13442814","P1433":"Q134028972","P1476":{"text":"Information System for Design of Thin Multilayer Film Processes Parameters Management based on Diffusion","language":"en"},"P407":"Q1860","P953":"https://ceur-ws.org/Vol-3896/short11.pdf","P50":[],"P2093":[{"value":"Mykhaylo Petryk","qualifiers":{"P1545":"1"}},{"value":"Vitalii Chyzh","qualifiers":{"P1545":"2"}},{"value":"Halyna Tsupryk","qualifiers":{"P1545":"3"}},{"value":"Oksana Petryk","qualifiers":{"P1545":"4"}}]}}