Vol-1637⫷ Vol-1638 ⫸Vol-1639
urn:nbn:de:0074-1638-0


Vol-1638/Paper18⫷Vol-1638/Paper19⫸Vol-1638/Paper20
Payal VermaKhamar Zaman KhanSergey A. FomchenkovRam Gopal

SU-8 based UV-LIGA fabrication process for realization of nickel based MEMS inertial sensor