Vol-1899⫷ Vol-1900 ⫸Vol-1901
urn:nbn:de:0074-1900-0


Vol-1900/paper19⫷Vol-1900/paper20⫸Vol-1900/paper21
Sergey A. FomchenkovSergey D. Poletaev

Deposition of Zinc Oxide thin film layer with the help of modified sputtering system