Vol-2024⫷ Vol-2025 ⫸Vol-2026
urn:nbn:de:0074-2025-0


Vol-2025/paper_sami40_1⫷Vol-2025/paper_sami40_2⫸Vol-2025/paper_ddds_1
Bernd WaschneckLee Wei Fong BrianKoh Chey Woon BennyChristoph RipplerGottfried Schmid

Unified Frontend and Backend Industrie 4.0 Roadmap for Semiconductor Manufacturing