Vol-3895⫷ Vol-3896 ⫸Vol-3897
urn:nbn:de:0074-3896-0


Vol-3896/paper28⫷Vol-3896/short11⫸Vol-3896/paper29
Mykhaylo PetrykVitalii ChyzhHalyna TsuprykOksana Petryk

Information System for Design of Thin Multilayer Film Processes Parameters Management based on Diffusion